Semiconductor memory having a polycrystalline silicon load resistor and CMOS peripheral circuitry

ABSTRACT

A semiconductor memory device is provided which has a plurality of memory cells each including a pair of cross-coupled metal insulated gate field effect transistors having channels of N-conductivity type, and a pair of load resistors of polycrystalline silicon respectively coupled to the pair of cross-coupled transistors. A peripheral circuit is also provided which is constituted by metal insulated gate field effect transistors having channels of the N-conductivity type and metal insulated gate field effect transistors having channels of P-conductivity type. The semiconductor memory device is formed in an N-type semiconductor substrate, and the pair of cross-coupled metal insulated gate field effect transistors of the memory cells are formed in a well region of P-type which forms a PN-junction with the semiconductor substrate to help reduce the susceptibility to soft errors.

This is a continuation of application Ser. No. 684,867, filed Apr. 15, 1991, which is a continuation of application Ser. No. 383,536, filed Jul. 24, 1989, which is a continuation of application Ser. No. 140,243 filed Dec. 31, 1987 (now abandoned), which is a divisional of application Ser. No. 818,200 filed Jul. 22, 1977 (now abandoned).

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates in general to a semiconductor device and in particular concerned with a semiconductor memory device of a flip-flop type constituted by MISFET semiconductor devices, and a method of fabricating the same.

2. Description of the Prior Art

As a semiconductor memory device, a dynamic flip-flop type semiconductor memory device composed of four MISFET's is disclosed in the specification of U.S. Pat. No. 3,541,530. In such a dynamic memory type of semiconductor memory device, the holding of information can be effected without supplying current constantly, to thus avoid useless power consumption. Further, the memory cell can be implemented in a small area. However, since the stored information tends to be lost due to leakage, it is required to carry out periodically the refreshing operation. Such being the case complicated interface circuitry for the refreshing operation is required.

On the other hand, as a static memory type of semiconductor device, there is disclosed in the specification of U.S. Pat. No. 3,560,764 a flip-flop type semiconductor memory device which comprises a pair of inverter circuits cross-coupled with each other, wherein each of the inverter circuits is composed of a MISFET serving as load and a driving MISFET. In the case of such a static type semiconductor memory device, no refreshing circuit is required, as differred from the dynamic type semiconductor memory device described above. However, the static type semiconductor memory device has a drawback in that power consumption is relatively large. In order to decrease the power consumption, it is necessary to make smaller the channel conductivity β (channel width W/channel length l) in the load MISFET of the memory device. This means that the channel length l has to be selected at a greater dimension, which in turn leads to an enlarged size of the load MISFET and hence degradation in the integration density.

As an attempt to overcome the above difficulties, there is taught in Japanese Patent Application Laid-Open No. 11,644/1975 s load means which is composed of a polycrystalline silicon layer having a resistivity increased by ion implantation in place of the MISFET, thereby to enhance the integration density. However, in practice, it is impossible to reduce the occupation area of a memory cell of the static type memory device to a degree corresponding to the area for the memory cell of the dynamic type memory device. Thus, there has been a demand for a memory device which has a high integration density compatible to that of the dynamic memory type memory device and allows the refreshing to be effected in a simple and facilitated manner.

SUMMARY OF THE INVENTION

Accordingly, an object of the invention is to provide a novel and improved semiconductor memory device in which the memory cell itself is operated in a static memory mode with charge leakage being constantly compensated by current supplied through a high resistance element, while the data line is operated in a dynamic memory mode as is the case of a flip-flop type memory cell composed by four MISFET's.

Another object of the invention is to provide a semiconductor memory device of a static memory type having a cell area substantially equal to that of the flip-flop type memory cell constituted by four MISFET's.

Still another object of the invention is to provide a semiconductor inverter device suited for the semiconductor memory device and a manufacturing process therefor.

Further object of the invention 1 is to provide a MIS type semiconductor memory device having a high integration density by adopting multi-wiring metallization layer structure.

According to one aspect of the invention, there is proposed a semiconductor memory device for storage of information in which the memory cell thereof is constituted by four MISFET's in a dynamic flip-flop type configuration for holding electric charge representative of written-in information in an information storage means, wherein charge leakage from the information storage means is compensated by current supplied thereto through a polycrystalline silicon element having a high resistivity and connected to a source voltage supply line.

BRIEF DESCRIPTION OF THE DRAWINGS

The forgoing and other objects, features and advantage of the invention will become more apparent from the following more particular description of preferred embodiments taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a diagram showing a layout of a semiconductor memory device according to an embodiment of the invention,

FIG. 2 is an equivalent circuit diagram of the semiconductor memory device shown in FIG. 1,

FIG. 3 shows diagrammatically a layout of a semiconductor memory array comprising four semiconductor devices shown in FIG. 1,

FIGS. 4A and 4B are sectional views showing a MISFET portion and a load resistor portion, respectively,

FIGS. 5A and 5B illustrate graphically correlation between information holding currents and applied voltages in a semiconductor memory device,

FIG. 6 illustrates graphically the correlation between the number of impurity ions implanted into a polycrystalline silicon and the resultant resistivity thereof,

FIGS. 7A to 7E show in plan views a manufacturing process for fabricating the semiconductor device shown in FIG. 1,

FIGS. 8A to 8E are sectional views of FIGS. 7A to 7E, wherein FIG. 8A is a section taking along the line VIIIA--VIIIA in FIG. 7A, FIG. 8B is a section along the line IIIB--VIIIB in FIG. 7B, FIG. 8C is a section along the line. VIIIC--VIIIC in FIG. 7C, FIG. 8D shows a section along the line VIIID--VIIID in FIG. 7D, FIG. 8E shows a section along the line VIIIE--VIllE in FIG. 7E,

FIG. 9 is a circuit diagram showing another embodiment of the invention in which complementary . MISFET (hereinafter referred to simply as CMIS) are employed for the interface circuitry,

FIG. 10 is a block diagram showing a 4-bit CMIS type static random access memory or RAM,

FIG. 11 is a circuit diagram showing in detail circuit portions shown in FIG. 10,

FIG. 12 is a circuit diagram showing a chip enabling buffer circuit employed in the embodiment shown in FIG. 11,

FIG. 13 shows a write enabling buffer circuit employed in the circuit of FIG. 11,

FIG. 14 shows a data input buffer circuit for use in the circuit of FIG. 11,

FIG. 15 shows a buffer circuit for externally, applied address signals A₀ to A₄ as used in the circuit shown in FIG. 11,

FIG. 16 shows a buffer circuit for externally applied address signals A₅ and A₆,

FIG. 17 shows a buffer circuit for externally applied address signals A₇ to A₁₁,

FIG. 18 shows a timing pulse generator circuit for use in the circuit shown in FIG. 11,

FIG. 19 shows a timing pulse generator circuit also to be used in the circuit shown in FIG. 11,

FIG. 20 shows a timing chart for a read cycle,

FIG. 21 shows a timing chart for a write cycle,

FIG. 22 shows a timing chart for a read and write cycle,

FIG. 23 is a sectional view of a CMIS type semiconductor memory device, and

FIGS. 24A to FIG. 24J illustrate stepwise a process of fabricating a semiconductor memory device shown in FIG. 23.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring to FIG. 1 which shows a layout of a semiconductor memory device according to an embodiment of the invention, a region denoted by a single-dotted broken line 1 is constituted by a diffused layer which has been formed by diffusing selectively into a surface of a semiconductor substrate an impurity of a conductivity type opposite that of the semiconductor substance of the substrate. Regions 2a, 2b and 2c as represented by broken lines are respectively constituted by a polycrystalline silicon layer with the region 2a serving as a power source line or V_(DD) line, while the line 2b serves to interconnect one end of each of transmission FET's (field effect transistors) Q₃ and Q₄, source terminals of driving FET's Q₁ and Q₂, gate electrodes of the latter and load resistors R₁ and R₂. The region 2c functions as a word line. Regions 3a and 3b are formed by polycrystalline silicon layers which constitute the resistors R₁ and R₂, respectively. It will be noted that, although the resistance regions 3a and 3b are formed integrally with the polycrystalline silicon layers 2a and 2b, the former layers 3a and 3b have higher resistivity with lower impurity concentration. Reference letters 5a, 5b and 5c denote electrode wiring metallization layers of aluminium. The wiring metallization layer 5a constitutes a true digit line or d line with the wiring metallization layer 5b constituting a ground line or GND line, while the layer 5c constitutes a complementary or bar digit line or d line. Regions 6a and 6b serve as contact areas between the diffused layers constituting the respective other ends or terminals of the transmission FET's Q₃ and Q₄ and the associated electrode wiring metallization layers. Regions denoted by double-dotted broken lines 7a and 7b constitute contact areas between silicon gates of the driving FET's Q₁ and Q₂ and the diffused layers constituting the one end portions of FET's Q₃ and Q₄. At these regions, contacts are made directly to the diffused layer through polycrystalline silicon layer. Such a contacting technique as employed forming the contact regions 7a and 7b is referred to as direct contact.

FIG. 2 shows an electric circuit diagram equivalent to The structure of the semiconductor memory device or memory cell described above in conjunction with FIG. 1. In FIG. 2, those portions as shown enclosed in broken line frames or blocks are constituted by polycrystalline silicon layers which have been simultaneously formed. More particularly, all the regions are formed by polycrystalline silicon layers, inclusive of the source voltage line (V_(DD) line) for applying voltage from an external power source except for a wire bonding pad for bonding the wire layer to be connected to a leading-out wire. Junctions Da and Db corresponds, respectively, to the direct contact portions 7a and 7b shown in FIG. 1.

FIG. 3 shows a layout of a Semiconductor memory device including an array of four .memory cells shown in FIG. 1. In FIG. 3, regions shown in broken lines are constituted by the polycrystalline silicon layers, regions shown in solid lines are aluminum (Al) wiring metallization layers, and regions shown in double-dotted broken lines represent the direct contacts. For the clarity of illustration, the diffused regions are omitted. In the figure, reference symbols C₁₁ and C₁₂ represent contact regions between the diffusion layers and the digit lines of Al for the first memory cell. These contact regions serve at the same time as contacts for other memory cells which are not shown. In a similar manner, C₂₁ and C₂₂ represent contact portions for the second memory cell, C₃₁ and C₃₂ are contact portions for the third memory cell, and C₄₁ and C₄₂ are contact portions for the fourth memory cell. It will be noted that these contact portions or regions C₂₁ ; C₂₂, C₃₁ ; C₃₂ and C₄₁ ; C₄₂ serve simultaneously as the contacts for other associated memory cells not shown. Since the contacts for the digit line of Al are both utilized as the contacts for the other memory cells (not shown) in the illustrated memory cell array, it may be regarded in practice that only a single contact is provided for each of the memory cell. Further, reference symbols G₁, G₂, G₃ and G₄ in FIG. 3 represent contact regions between the ground lines and the diffused layers (source regions) in the first, second, third and the fourth memory cells, respectively. Namely one contact with the ground line is required for each of the memory cells. The symbols R₁ and R₂ represent the load resistors for the first memory cell, R₃ and R₄ are load resistors for the second memory cell, R₅ and R₆ are load resistors for the third memory cell, and R₇ and R₈ are load resistors for the fourth memory cell. In respect of the geometrical array of the four memory cells, it will be seen from FIG. 3 that the second memory cell comprising C₂₁, C₂₂, G₂, R₃ and R₄ corresponds to the first memory cell comprising C₁₁, C₁₂, G₁, R₁ and R₄ and having been shifted laterally or horizontally to the right as viewed in FIG. 3. Further, the array of the third memory cell including C₃₁, C₃₂, G₃, R₅ and R₆ can be obtained geometrically by rotating the first cell for 180° about a point "A". The fourth memory cell including C₄₁, C₄₂, G₄, R₇ and R₈ may be considered as the array of the third memory cell shifted or displaced laterally to the right as viewed in FIG. 3. The memory device composed of the four memory cells shown in FIG. 3 may be expanded in the vertical direction (in the column direction) by providing other memory cells in a symmetrical array relative to the line L₁ --L₁ and/or line L₂ --L₂, while in the horizontal direction (in the row direction) other memory cells may be additionally provided in the same configuration as the individual memory cells described above but displaced in the horizontal direction, whereby a memory matrix of a given number of the memory cells can be formed.

Next, description will be made on MISFET regions and the load resistor portions.

FIG. 4A shows schematically a MISFET (metal-insulator-semiconductor field effect transistor) of a LOCOS (local oxidation of silicon) structure for facilitating the multi-layer wiring metallization. In the figure, reference numeral 1 denotes a diffused layer, 8a denotes a SiO₂ film for passivating the semiconductor surface, 8b denotes a gate insulating film and 9 denotes a semiconductor substrate.

FIG. 4B shows schematically a structure of the load resistor constituted by polycrystalline silicon layer. Polycrystalline silicon regions 2a, 2b and 2c (FIG. 4A) are of a low resistivity and utilized as the wiring layers, while a polycrystalline silicon region 3a of a high resistivity is intended to serve as the load resistor. Reference numeral 4 denotes a CVD-SiO₂ film. The structure is shown in the state immediately after the impurity has been introduced into the polycrystalline silicon layer.

FIGS. 5A and 5B graphically illustrate how much current should be fed through the load means in order to hold stored information at different temperatures (room temperature of 25° C. in the case of FIG. 5A and 70° C. in FIG. 5B), respectively. In these figures, relationships between the holding currents I_(DM) and the applied voltages V_(DM) in two memory cells are illustrated in connection with four different information samples a, b, c and d. It will be noted that the holding current I_(DM) is the one caused to flow through the source voltage line (V_(DD) line) shown in FIG. 2 upon application of the voltage V_(DM) thereto.

As can be seen from the graph shown in FIG. 5A which is plotted at the room temperature of 25° C, even in the case of the sample a which requires the greatest holding current, the amount on the order of 5×10⁻⁸ A for each memory cell will be sufficient for holding the stored information at the source voltage V_(DD) of 12 V. Accordingly, power consumption per memory cell will become only on the order of 0.6×10⁻⁶ W (i.e. 0.6 μW).

When the temperature of the device is increased, the current required for holding information will be also correspondingly increased, because current leakage through junction will increase as a function of temperature rise. This will be clearly seen from FIG. 5B which shows the relationships between the holding current I_(DM) and the applied voltage as regards to the identical samples with those of FIG. 5A but at a high temperature, say, 70° C.

In general, the current leakage will be increased as the device temperature rises. However, according to the teaching of the invention, there is no fear that the information holding should be disabled due to the temperature rise. This is because the current supply to the memory cell is increased as the current leakage increases, by virtue of the fact that the resistivity of the polycrystalline silicon layer constituting the load means according to the teachings of the invention is decreased as a function of rise in temperature.

The resistivity of the portion of polycrystalline silicon layer constituting the load means can be selectively adjusted by correspondingly adjusting the impurity concentration through ion implantation process, for example. FIG. 6 illustrates graphically a relationship between the resistance value of the load region and the number of implanted impurity ions. As can be seen from FIG. 6, when the number of implanted ions is in the range below 10¹⁵ /cm³, the resistivity R_(O) remains at substantially same value of about 10¹⁰ Ω/□, which allows facilitated control of the resistivity. Of course, it becomes necessary to increase the impurity ion implantation quantity in order to reduce the resistivity in the case where a large holding current is required.

In the following, a process for fabricating the memory cell shown in FIG. 1 will be stepwise described by referring to FIGS. 7A to 7E together with FIGS. 8A to 8E.

1) In the first place, a semiconductor substrate of an appropriate geometrical configuration having a resistivity in the range of 8 to 20 Ω-cm is prepared and an oxide film 11 of about 1μ thick is formed on a surface of the substrate through a thermal treatment.

2) The oxide film is then selectively etched away in order to expose the surface region of the semiconductor substrate in which MISFET is to be formed.

3) Subsequently, a gate oxide film (SiO₂) 12 of a thickness in the range of 750 to 1000 Å is formed on the exposed surface region of the semiconductor substrate (refer to FIGS. 7A and 8A).

4) The gate oxide film 12 is then subjected to a selective etching treatment thereby to form holes 13 and 13' for the direct contact with polycrystalline silicon layers described hereinbefore (refer to FIGS. 7B and 8B).

5) Subsequently, silicon is deposited through a CVD (chemical vapor deposition) process over the whole major surface of the semiconductor substrate 10 having the oxide film 11, the gate oxide film 12 and the contact holes 13 and 13', thereby to from the polycrystalline silicon layers in thickness of 3000 to 5000 Å.

6) The polycrystalline silicon layer is selectively etched away. Thereafter, the gate oxide film 12 is selectively removed through etching with the remaining polycrystalline silicon layer portions 14 being used as the mask (refer to FIGS. 7C and 8C).

7) CVD-SiO₂ film is formed over the whole major surface of the semiconductor substrate in thickness of 2000 to 3000 Å through CVD process.

8) The CVD-SiO₂ film 15 is selectively removed, with the portions thereof overlying the polycrystalline silicon layer regions at which the resistors are to be formed being rendered to remain.

9) Phosphorus is diffused into the semiconductor substrate 10 by using the polycrystalline silicon layer as the diffusion mask, thereby to form the source region 16 and the drain region 17 having impurity concentration of 10²⁰ atoms/cm³. At that time, the impurity is also driven in the polycrystalline silicon layer, whereby the gate electrode 18, the direct contact 7b, the word line 20 and the source voltage supplying or V_(DD) line are simultaneously formed (refer to FIGS. 7D and 8D).

10) The CVD-SiO₂ film 15 is subsequently removed and a PSG (phospho-silicate glass) film 20 is formed over the whole major surface of the semiconductor substrate 10 in thickness of 7000 to 9000 Å.

11) Thereafter, ahnminium (Al) film 21 of 1μ thick is formed over the whole major surface of the semiconductor substrate 10 through evaporation of Al.

12) The Al-film 21 is selectively etched away, thereby to form the ground line 22 and the digit lines 23 and 24 (refer to FIGS. 7E and 8E).

The above described process is a typical one for implementing the memory cell according to the invention. It should be, however, appreciated that the above process is suceptible to many modifications such as follows:

a) With a view to adjusting the resistivity of the load resistors R₁ and R₂, implantation of impurity ions into the polycrystalline silicon layer 14 may be carried out in succession to the step 5).

b) In place of forming the CVD-SiO₂ film 15 after the step 6), it is possible to deposit the SiO₂ film 15 through CVD treatment over the whole major surface of the semiconductor substrate 10 with the gate oxide film 12 remaining as it was. In the latter case, the offset dimension of the polycrystalline silicon layer 14 relative to the oxide film 11 as represented by S in FIG. 8C will be reduced, resulting in an improved deposition of the CVD-SiO₂ film 15.

c) Instead of adopting the external deposition method such as for forming the CVD-SiO₂ film 15, the surface of the polycrystalline silicon layer 14 may be thermally oxidized, whereby the oxide film thus produced may be used as the etching mask. In such case, the peripheral portions of the polycrystalline silicon layer can be adequately covered by the oxide film, so that the introduction of impurity can be prevented in a satisfactory manner.

d) The memory cell according to the invention is suitably adapted to be implemented in a flat LOCOS structure shown in FIG. 4A which allows the multi-layer wiring metallization in a facilitated manner. An exemplary embodiment of the LOCOS structure will be described hereinafter.

e) The film for covering the portions of the polycrystalline silicon layer at which the resistance regions are to be formed is not restricted to the CVD-SiO₂ film. Other suitable insulation film such as Si₃ N₄ film may be used.

Next, description will be made on an exemplary embodiment of CMIS type semiconductor memory device in which the memory cell is composed of a flip-flop constituted by MISFET's of the same conductivity type serving as the switching means with the load means being formed of polycrystalline silicon layers of a high resistivity, while interface circuitry is formed by a CMIS type circuit.

FIG. 9 shows a fundamental arrangement of the CMIS type memory device incorporating therein an interface circuitry of CMIS type. In the figure, reference numeral 1 designates generally a memory cell which is composed of N-channel type MISFET's M₁ to M₄ and resistors R₁ and R₂ each having a high resistivity. More particularly, the N-channel MISFET M₁ cooperates with the resistor R₁ to constitute a first inverter, while the N-channel MISFET M₂ and the resistor R₂ form together a second inverter. The first and second inverters are cross-coupled to each other, thereby to constitute a flip-flop which is a main part of the memory cell.

Symbols M₅ and M₆ denote P-channel type MISFET's which constitute together a pre-charging circuit PC and function as pre-charging transistors to attain dynamic operation.

MISFET's M₇ to M₁₀ are adapted to constitute a sense amplifier SA. MISFET's M₇ and M₉ are of P-channel type, while the other MISFET's M₈ and M₁₀ are of N-channel type. Symbol M₁₁ denotes a switching MISFET of N-channel type.

A pair of data lines l₁ and l₂ are connected to the sense amplifier SA, while lines l₁ ' and l₂ ' are connected to the output of a data input/output circuit not shown.

In operation, MisFET's M₅ and M₆ are turned on and off, respectively, in response to low and high levels of a chip selection signal CE appearing at terminal CE₂. When MISFET's M₅ and M₆ are turned on, capacitors (not shown) associated with the data lines l₁ and l₂ are charged. MISFET's M₃ and M₄ are turned on in response to a high level of the word signal. The sense amplifier SA is enabled for operation in response to a high level of clock signal φ which renders the switching MISFET M₁₁ conductive.

In operation for reading out data from the memory cell: MISFET's M₃ and M₄ are turned on by making high the level of the word signal on the word line while the level of the chip selection signal CE is high so that the data lines l₁ and l₂ are set to signal states which are determined by the content stored in the memory cell; and thereafter by making the level of the clock signal φ high to make the sense amplifier SA operable, the sense amplifier SA performs an amplifying operation according to the signal states of the data lines.

The write-in operation into the memory cell is effected in dependence upon the signal state set at the data lines l₁ and l₂ in response to the high level of the word signal.

It will be appreciated that the semiconductor memory device of CMIS type described above comprises N-channel type MISFET's as the driving means for the memory cell and the load means constituted by the polycrystalline silicon layers rather than P-channel MISFET's. For the interface circuitry of the memory cell, a conventional CMIS circuit configuration is adopted.

In the following, a practical example to which the CMIS-type semiconductor memory device described above can be applied will be mentioned.

FIG. 10 is a block diagram of a CMOS-type static random access memory or RAM of four-bit to which the CMIS-type semiconductor memory device shown in FIG. 9 can be applied. In FIG. 10, reference symbols A_(O) to A₁₁ represent terminals to which addressing signals are supplied from external source, D_(in) and D_(out) are input and output terminals, respectively, WE is a write-enabling signal input terminal and CE is a chip-enabling signal input terminal. In succession to the various input terminals, there are provided associated buffer stages, i.e. address buffer circuits 50 to 61, an input buffer circuit 62, a write enabling signal buffer circuit 63 and a chip-enabling signal buffer circuit 64. In a similar manner, an output buffer circuit 65 is connected to the output terminal D_(out). Further, numeral 66 denotes a row decoder circuit, 67 a clock generator circuit, 68 a memory cell matrix including 64×64 row and column memory cells in a matrix array, 69 an input/output circuit for the column memory cells and 70 denotes a column decoder circuit associated with the memory cells.

In the following, more detailed description will be made on the individual circuit portions shown in FIG. 10.

FIG. 11 is a circuit diagram showing detailed circuit arrangements of the row decoder circuit 66, the clock generator circuit 67, the memory cell matrix circuit 68, the column input/output circuit 69 and the column decoder circuit 70 which make part of the semiconductor memory device shown in FIG. 10. In FIG. 11, RD1, RD2 and so forth denote row address decoder circuits which are provided at the center of the memory cell matrix, i.e., between the 32nd and 33rd columns, in order to accomplish a high speed operation. The blocks LD1, LD2, . . . , LD16 represent column address decoder circuits each of which is adapted to output two address output signals, i.e. true and false address signals. As can be seen from the drawing, address outputs Y₁ and Y₂ are produced from the column address decoder circuit LD1. Address outputs Y₃ and Y₄ are produced from the circuit LD2, address outputs Y₂₉ and Y₃₀ are produced from the circuit LD15 and address outputs Y₃₁ and Y₃₂ are produced from the column address decoder LD16. In a similar manner, a pair of address outputs are produced from each of the other column address decoder circuits (not shown). These address outputs are coupled to respective decoder driver circuits D₁ , D₃, . . . D₃₀, D₃₂.

Each of the decoder driver circuit is adapted to produce two address output signals. Accordingly, with the aid of thirty-two (32) decoder driver circuits, 1st to 62nd column addresses can be selected. One row is selected by address control signals a5 and a5. Symbols Q₂, Q₆, . . . Q₆₁ and Q₆₃ represent buffer amplifiers. Symbols SA₂, SA₆, . . . , SA₆₁ and SA₆₃ represent the sense amplifiers each of which corresponds to the one (SA) shown in FIG. 9, while PC₂, PC₆, . . . , PC₆₁ and PC₆₃ are precharging circuits each of which corresponds to the one denoted by PC shown in FIG. 9 and is composed of the precharging transistors M₅ and M₆ described hereinbefore. Further, N-channel type MISFET M₂₀ corresponds to the switch M₁₁ shown in FIG. 9. P-channel type MISFET M₂₁ serves as a precharging transistor to hold the sense amplifier SAL at a high level (or V_(CC) level) until information has been determined, thereby to inhibit operation of the sense amplifiers SA₂, SA₆, . . . , SA₆₁ and SA₆₃. With such arrangement to hold the sense amplifier SAL at the high level, the sense amplifiers SA₂, etc. can be protected from erroneous operation due to external noises. In the Case of the circuit shown in FIG. 9, when MISFET M₁₁ is in the off state, the junction J will be in the floating state which is favorable to reception of noise. Thus, there arises a possibility that erroneous operation may be effected without information on the lines l₁ and l₂ having been determined.

FIGS. 12 to 19 show in detail individual circuit configurations for obtaining signals to be inputted to the circuit shown in FIG. 11.

FIG. 12 is a detailed circuit diagram of the chip enable buffer circuit 64 shown in FIG. 10 which is adapted to produce internal signals CE₁, CE₁, CE₂, CE₂, CE₃, φy and X in response to the externally applied chip enabling signal CE. The switches SW shown in FIG. 12 are in the state to transmit therethrough the above described internal signals, when the chip enabling signal CE is applied. When the above internal signals are to be taken out in response to the external chip enabling input signal CE, the states of the switches SW are changed over. Such switching of the switches SW can be realized by modifying slightly wiring arrangement in the semiconductor integrated circuit through a conventional process commonly known as master slice technic.

FIG. 13 shows in detail a circuit configuration of the write enabling buffer circuit 63 shown in FIG. 10 which serves to produce internal signals φ_(R), WE and φ_(W) in response to the externally applied write enabling signal WE. In this case, the exchange between CE and CE can be implemented by the master slice technic.

FIG. 14 is a detailed circuit diagram of the data input buffer circuit 62 shown in FIG. 10 and adapted to produce internal data signals "din" and "din" in response to the external data input signal D_(in).

FIG. 15 shows a circuit diagram of the address buffer circuits 51 to 54 shown in FIG. 10 which is arranged so as to produce internal address signals a₀ to a₄ and a₀ to a₄ in response to the external address input signals A₀ to A₄.

FIG. 16 is a detailed circuit diagram of the address buffer circuits, 55 and 56 shown in FIG. 10. This circuit serves to produce internally the address control signals a₅ and a₅ as well as address signals a₆ and a₆ in response to the externally applied address signals A₅ and A₆.

FIG. 17 shows a circuit arrangement of the address buffer circuits 57 to 61 shown in FIG. 10 which is adapted to produce internal address signals a₇ to a₁₁ and a₇ to a₁₁ in response to the external address signals A₇ to A₁₁.

FIG. 18 shows a timing pulse generator circuit for producing internal signals φ_(x), φ_(x1) and φ_(x2) from the internal address signals a₀ to a₁₁, a_(O) to a₁₁ and the internally produced signal CE₃.

FIG. 19 shows another timing pulse generator circuit for producing internal signals φ_(y).A₁₁, φ_(M) and φ_(M) from the internal produced signal φ_(y).

The external signals described are produced in such timing relation as shown in timing charts of FIGS. 20 to 22. In particular, FIG. 20 shows the timing chart for a read cycle, FIG. 21 shows the timing chart for a write cycle and FIG. 22 shows a timing chart for the case in which the read and write operations are executed in one cycle.

In FIGS. 20 to 22, reference characters denote following time durations:

    ______________________________________                                         t.sub.C :   cycle time                                                         t.sub.AC :  access time                                                        t.sub.CE :  chip enabling duration                                             t.sub.P :   chip enabling precharging time                                     t.sub.AH :  address holding time                                               t.sub.AS :  address set-up time                                                t.sub.OFF : output buffer delay time                                           t.sub.WS :  write enabling set-up time                                         t.sub.DLH : input data holding time                                            t.sub.WW :  write enabling duration                                            t.sub.MOD : modify time                                                        t.sub.WPL :                                                                                 ##STR1##                                                          t.sub.DS :  input data set-up time                                             t.sub.WH :  write enabling holding time                                        t.sub.T :   rise-up and breaking time                                          ______________________________________                                    

Next, structural features as well as fabrication process of the above mentioned CMIS type semiconductor memory device will be described.

FIG. 23 is a sectional view of such CMIS type semiconductor memory device. In the figure, reference numeral 103 denotes a semiconductor substrate of N-type conductivity, 104 a P-type semiconductor well, 105 a thick film of SiO₂, 106 a gate insulating film, 107 a gate electrode of polycrystalline silicon and 108 a polycrystalline silicon layer formed simultaneously with the gate electrode 107. The polysilicon layer 108 is, however, of a high resistivity, because the doping of impurity is prevented at the region 108a through the partial masking by a CVD film 109 of SiO₂. The polycrystalline silicon layer 108 thus formed is employed as a high resistance means constituting the load for the memory cell. Reference numeral 110 denotes a source of P-channel MISFET, 111 a drain of the P-channel MISFET, 112 a source of N-channel MISFET, 113 a drain of P-channel MISFET, 114 a PSG film for the surface passivation, and 115 aluminium electrodes.

FIGS. 24A to 24J illustrates stepwise a fabrication process of the above described semiconductor memory device.

1) A major surface of N-type semiconductor substrate 103 is oxidized, thereby to form the SiO₂ film 105 which is then partially removed away through photo-etching treatment at the region in which the well is to be formed. Subsequently, the well is subjected to ion implantation. Numeral 116 denotes a photo-resist film (refer to FIG. 24A).

2) Thereafter, a P-type impurity substance is diffused to form the P-type semiconductor well 104 (refer to FIG. 24B ).

3) After the SiO₂ film 105 formed on the semiconductor surface is removed, a thin insulation film 118 is formed on the surface and then nitride (Si₃ N₄) film 17 is formed thereon through deposition. Subsequently, the photo-resist film 116 is formed to be used as a mask for selectively removing the nitride film 117 through photo-etching (refer to FIG. 24C).

4) Photo-resist film 116 is formed over the semiconductor surface except for the well region. In this state, the ion implantation is carried out (refer to FIG. 24C).

5) Starting from the state just above described, selective oxidization is conducted with the nitride film 117 being used as the mask, thereby to form an isolation film for isolating active element from one another. Then, the nitride film 117 used as the mask is removed. The rear surface of the semiconductor substrate 103 is also etched (refer to FIG. 24E).

6) The semiconductor surface is subjected to thermal oxidization to form the gate insulation film 106 and followed by the formation of the polycrystalline silicon layers 107 and 108. The layer 107 constitutes the gate electrode, while the layer 108 constitutes the high resistance means to provide the load for the memory cell. After the polycrystalline silicon layers 107 and 108 have been formed, ion implantation is effected at a low concentration, thereby to adjust the resistivity of the load region at a predetermined value (refer to FIG. 24F).

7) A mask 119 is formed over the semiconductor well 104. In this state, windows are provided for P-type impurity diffusion to form the source and drain regions of P-channel MISFET (refer to FIG. 24G).

8) The mask is then removed. The P-channel portion in turn is covered by the mask 119. Simultaneously, a portion of the polycrystalline silicon layer 108 is also covered by the mask, with a view to protecting the latter from impurity diffusion, thereby to maintain the high resistivity. In this state, windows for N-type impurity diffusion is provided to form the source 112 and the drain 113.

9) Thereafter, PSG film 114 is formed and subjected to the photo-etching treatment so as to form windows for leading out electrodes (refer to FIG. 24I).

10) Finally, aluminium electrodes are formed.

The above described embodiment of the invention brings about following advantages;

a. The resistivity of the high resistance region formed of polycrystalline silicon serving as a load for the memory cell is so selected that the resistance region can be made in an extremely small area and that the load resistor may supply a very small current therethrough to compensate the leakage of electric charge representing the written information stored in the memory cell, which leakage would occur before the memory cell is refreshed. For example, the resistivity may be on the order of 10 GΩ. It will be appreciated that such leakage is ascribable to the current flowing through parasitic capacitance at the junction and the tailing current flowing through the MISFET in the OFF state. The semiconductor memory device according to the invention can thus be operated as a static memory without requiring periodical refreshing of the memory cell by virtue of the fact that only a small current may be supplied to the information storing means (or capacitor) through the polycrystalline silicon resistor for compensation of the possible current leakage.

On the other hand, dynamic operation can be effected in the interface circuit for the memory cell by actuating the precharging circuits (PC, PC₁, PC₄ . . . ) by the chip enabling signal. Of course, it is also possible to operate the circuit in the static mode without resorting to the clock drive by using the precharging circuit. In the latter case, the semiconductor memory of the static memory type can be accomplished with substantially the same cell area as that of the memory cell of the flip-flop memory cell of the dynamic type constituted by four MOSFET's. In this connection, it has been found that the cell area of the semiconductor memory device according to the invention is significantly reduced to 0.38 in area ratio as compared with the cell area of the memory cell of a static memory device of a flip-flop configuration constituted by six MOSFET's (6 MOS-memory cell) and including an enhancement type MOSFET as the load means. Further, when compared with the 6 MOS-memory cell which includes a depletion type MOSFET as the load means which allows the memory cell area to be reduced as is well known in the art, the cell area of the memory device according to the invention can be much reduced to 0.65 to 1 in area ratio. Besides, the cell area of the memory device according to the invention can be remarkably reduced to 0.31 to 1 in area ratio relative to that of the CMOS type memory cell. In the case of CMOS-type memory device, the well junction has to be interposed between the P-channel MOSFET and N-channel MOSFET, which necessarily requires a rather great distance between the P- and N-channel MOSFET's and thus provides a major cause to degradation in the integration density. On the contrary, the memory cell according to the invention is constituted by one channel type MISFET of the complementary MIS circuit without use of the other channel-type MISFET. Thus, a large distance is not required between these MISFET elements, whereby integration density can be significantly increased.

b. Since the load means is composed of a polycrystalline silicon resistor having a high resistivity, the current flowing therethrough is restricted to a degree which allows the memory to be refreshed, power consumption can be reduced to a substantially same level as that of the complementary MIS-type memory. Of course, no circuit is required for the refreshing. On the other hand, complementary a MIS-type circuit is employed in the interface circuit to take advantage of such CMIS circuit.

c. Since the polycrystalline silicon layer forming the load means can be formed integrally with the polycrystalline silicon layer for applying the source voltage to the load means, no specific area for providing contact between the load and the lead layer is required, which also contributes to reduction in the area of the memory device. More particularly, in the memory matrix or array comprising a plurality of memory cells according to the invention, the source voltage line and the load means can be formed by an integral polycrystalline silicon layer, wherein the source voltage line is connected to the pad of the aluminium wiring at the outside of the memory matrix. Thus, the number of connections or contacts between the source voltage line and the aluminium wiring can be significantly decreased. This feature is not restricted to the memory cell, but can be applied generally to semiconductor devices incorporating therein inverter devices composed of driver means connected to the ground terminal and a load means connected to the terminal to which the source voltage is applied. 

We claim:
 1. A static random access memory device comprising:a semiconductor substrate having a main surface, said semiconductor substrate including:an N-conductivity type semiconductor region which extends into said semiconductor substrate from said main surface, and a P-conductivity type semiconductor region which extends into said N-conductivity type semiconductor region from said main surface to such a depth that said P-conductivity type semiconductor region forms a PN junction with said N-conductivity type semiconductor region; an array of memory cells formed on said semiconductor substrate in rows and columns; each of said memory cells of said array consisting essentially of a first and a second driving MISFET, a first and a second transmission MISFET, and a first and a second load means, each of said driving and transmission MISFETs being an N-channel MISFET, and having a gate, a source region and a drain region, each of said first and second load means being comprised of polycrystalline silicon material formed on an insulating film covering said main surface; each gate of said first and second driving MISFETs being cross-coupled to the drain region of the other driving MISFET in each said memory cell; each source region of said first and second driving MISFETs being coupled to a first ground line; source-drain paths of said first and second transmission MISFETs being coupled between the drain regions of said first and second driving MISFETs and associated data lines, respectively, in each said memory cell; said first and second load means being respectively coupled between a first power source line and respective drain regions of said first and second driving MISFETs in each said memory cell; and a peripheral circuit formed on said semiconductor substrate, said peripheral circuit including a P-channel MISFET and an N-channel MISFET which are connected in series with each other between a second power source line and a second ground line, wherein said source and drain regions of said first and second driving MISFETs and said source and drain regions of said first and second transmission MISFETs of each said memory cell are formed in said P-conductivity type semiconductor region.
 2. A static random access memory device as claimed in claim 1, wherein said peripheral circuit includes decoder circuits and sensing circuits.
 3. A static random access memory device as claimed in claim 1, wherein said polycrystalline silicon material of said first and second load means has an impurity concentration corresponding to a dosage of ions less than 10¹⁵ per cm³.
 4. A static random access memory device as claimed in claim 1, wherein said first power source line is comprised of polycrystalline silicon material.
 5. A static random access memory device as claimed in claim 4, wherein said first and second load means are unitary with said first power source line, and wherein said first and second load means and said first power source line are comprised of said polycrystalline silicon material.
 6. A static random access memory device comprising:a semiconductor substrate having a main surface, said semiconductor substrate including:an N-conductivity type semiconductor region which extends into said semiconductor substrate from said main surface, and a P-conductivity type semiconductor region which extends into said N-conductivity type semiconductor region from said main surface to such a depth that said P-conductivity type semiconductor region forms a PN junction with said N-conductivity type semiconductor region; an array of memory cells formed on said semiconductor substrate in rows and columns, each of said memory cells consisting essentially of four N-channel MISFETs and two loads comprising polycrystalline silicon formed on an insulating film covering said main surface, the first and second of said four MISFETs being cross-coupled to each other to provide a flip-flop circuit while the third and fourth MISFETs are coupled to said cross-coupled pair of MISFETs to provide transmission paths of data, said loads coupling a power source line to said cross-coupled pair of MISFETs; a plurality of word lines arranged substantially in parallel with each being arranged as gate electrodes of said third and fourth MISFETs of each of memory cells arranged in a row of said memory array; a plurality of data lines substantially parallel with each other, arranged substantially orthogonally to said word lines, a pair of said data lines being coupled to the source-drain paths of said third and fourth MISFETs of each of memory cells arranged in a column of said memory array; and a peripheral circuit coupled to the plural word and data lines, said peripheral circuit comprising a P-channel MISFET and an N-channel MISFET connected in series with each other, wherein said four MISFETs of each memory cell are formed in said P-conductivity type semiconductor region.
 7. A static random access memory device as claimed in claim 6, wherein said peripheral circuit includes a first decoder circuit coupled to said plural word lines, and a second decoder circuit and a sense circuit which are coupled to said plural data lines.
 8. A static random access memory device as claimed in claim 6, wherein said peripheral circuit includes sense circuits, each being coupled to said pair of data lines, and wherein each sense circuit comprises a pair of inverters of P-channel and N-channel MISFETs and connection means for cross-coupling said pair of inverters to provide a flip-flop circuit.
 9. A static random access memory device as claimed in claim 6, wherein each of said loads includes a portion having an impurity concentration corresponding to a dosage of ions less than 10¹⁵ per cm³.
 10. A static random access memory device as claimed in claim 6, wherein said power source line is comprised of polycrystalline silicon material.
 11. A static random access memory device as claimed in claim 10, wherein said power source line is unitary with said loads.
 12. A static random access memory device as claimed in claim 10, wherein said power source line is arranged in parallel with said plurality of word lines.
 13. A static random access memory device comprising:a semiconductor substrate having a main surface, said semiconductor substrate including:an N-conductivity type semiconductor region which extends into said semiconductor substrate from said main surface, and a P-conductivity type semiconductor region which extends into said N-conductivity type semiconductor region from said main surface to such a depth that said P-conductivity type semiconductor region forms a PN junction with said N-conductivity type semiconductor region; a plurality of memory cells formed on the semiconductor substrate in rows and columns, each memory cell consisting essentially of two cross-coupled MISFETs, two transmission MISFETs and two load means, wherein said two load means are comprised of polycrystalline silicon strips formed on an insulating film covering said main surface of said semiconductor substrate; and a peripheral circuit connected to the memory cells, wherein the MISFETs of the memory cells are formed as N-channel MISFETs in said P-conductivity type semiconductor region, and wherein the peripheral circuit is comprised of a P-channel MISFET and an N-channel MISFET connected in series with each other and formed on said semiconductor substrate.
 14. A static random access memory device comprising:a semiconductor substrate having a main surface, said semiconductor substrate including: an N-conductivity type semiconductor region which extends into said semiconductor substrate from said main surface, and a P-conductivity type semiconductor region which extends into said N-conductivity type semiconductor region from said main surface to such a depth that said P-conductivity type semiconductor region forms a PN junction with said N-conductivity type semiconductor region; an array of memory cells formed on said semiconductor substrate in rows and columns; each of memory cells of said array consisting essentially of a first and a second driving MISFET, first and second transmission MISFETs, and first and second polycrystalline silicon strips, each of said MISFETs being an N-channel MISFET, and having a gate, a source region and a drain region, each of said first and second polycrystalline silicon strips formed on an insulating film covering said main surface and being comprised of a first portion of high resistivity and a second portion of lower resistivity than said first portion; and each gate of said first and second driving MISFETs being cross-coupled to the drain region of the other driving MISFET in each said memory cell; each source region of said first and second driving MISFETs being coupled to a first ground line; source-drain paths of said first and second transmission MISFETs being coupled between the drain regions of said first and second driving MISFETs and associated data lines, respectively, in each said memory cell; said first and second polycrystalline silicon strips being respectively coupled between a first power source line and respective drain regions of said first and second driving MISFETs in each said memory cell; and a peripheral circuit formed on said semiconductor substrate, said peripheral circuit including a P-channel MISFET and an N-channel MISFET which are connected in series with each other between a second power source line and a second ground line, wherein said source and drain regions of said first and second driving MISFETs and said source and drain regions of said first and said second transmission MISFETs of each said memory cell are formed in said P-conductivity type semiconductor region.
 15. A static random access memory device according to claim 14, wherein said first portion acts as a load.
 16. A static random access memory device according to claim 14, wherein said first portion acts as a load.
 17. A static random access memory device according to claim 14, wherein said first portion acts as a load.
 18. A static random access memory device comprising:a semiconductor substrate having a main surface, said semiconductor substrate including: an N-conductivity type semiconductor region which extends into said semiconductor substrate from said main surface, and a P-conductivity type semiconductor region which extends into said N-conductivity type semiconductor region from said main surface to such a depth that said P-conductivity type semiconductor region forms a PN junction with said N-conductivity type semiconductor region; an array of memory cells formed on said semiconductor substrate in rows and columns, each of said memory cells consisting essentially of four N-channel MISFETs and two polycrystalline silicon strips having a first portion and a second portion formed on an insulating film covering said main surface, the first and second of said four MISFETs being cross-coupled to each other to provide a flip-flop circuit while the third and fourth MISFETs are coupled to said cross-coupled pair of MISFETs to provide transmission paths of data, said polycrystalline silicon strips coupling a power source line to said cross-coupled pair of MISFETs; a plurality of word lines arranged substantially in parallel with each other, each being arranged as gate electrodes of said third and fourth MISFETs of each of memory cells arranged in a row of said memory array; a plurality of data lines substantially parallel with each other, arranged substantially orthogonally to said word lines, a pair of said data lines being coupled to the source-drain paths of said third and fourth MISFETs of each of said memory cells arranged in a column of said memory array; and a peripheral circuit coupled to the plural word and data lines, said peripheral circuit comprising a P-channel MISFET and an N-channel MISFET connected in series with each other, wherein said four MISFETs of each memory cell are formed in said P-conductivity type semiconductor region, and wherein the resistivity of said first portion is higher than the resistivity of said second portion.
 19. A static random access memory device comprising:a semiconductor substrate having a main surface, said semiconductor substrate including: an N-conductivity type semiconductor region which extends into said semiconductor substrate from said main surface, and a P-conductivity type semiconductor region which extends into said N-conductivity type semiconductor region from said main surface to such a depth that said P-conductivity type semiconductor region forms a PN junction with said N-conductivity type semiconductor region; a plurality of memory cells formed on a semiconductor substrate in rows and columns, each memory cell consisting essentially of two cross-coupled MISFETs, two transmission MISFETs and two polycrystalline silicon strips each having a first and a second portion formed on an insulating film covering said main surface; and a peripheral circuit connected to the memory cells, wherein said second portion has the predetermined impurity concentration and said first portion has lower impurity concentration that the impurity concentration of said second region, wherein the MISFETs of the memory cells are formed as N-channel MISFETs in said P-conductivity type semiconductor region, and wherein the peripheral circuit is comprised of a P-channel MISFET and an N-channel MISFET connected in series with each other and formed on said semiconductor substrate. 